毫米波三维异质异构集成技术的进展与应用

三维异质异构集成技术是实现电子信息系统向着微型化、高效能、高整合、低功耗及低成本方向发展的最重要方法,也是决定信息化平台中微电子和微纳系统领域未来发展的一项核心高技术。文章详细介绍了毫米波频段三维异质异构集成技术的优势、近年来的发展趋势以及面临的挑战。利用硅基MEMS 光敏复合薄膜多层布线工艺可实现异质芯片的低损耗互连,同时三维集成高性能封装滤波器、高辐射效率封装天线等无源元件,还能很好地处理布线间的电磁兼容和芯片间的屏蔽问题。最后介绍了一款新型毫米波三维异质异构集成雷达及其在远距离生命体征探测方面的应用。     

多层圆片级堆叠THz硅微波导结构的制作

基于微电子机械系统(MEMS)工艺,提出一种多层圆片堆叠的THz硅微波导结构及其制作方法。为了验证该结构在制作THz无源器件中的优势,基于6层圆片堆叠的硅微波导结构,设计了一种中心频率365 GHz、带宽80 GHz的功率分配/合成结构,并对其进行了仿真。研究了制作该结构的工艺流程,攻克了工艺过程中的关键技术,包括硅深槽刻蚀技术和多层热压键合技术,并给出了工艺结果。最终实现了多层圆片堆叠功率分配/合成结构的工艺制作和测试。测试结果表明,尽管样品的插入损耗较仿真值增加3 dB左右,考虑到加工误差和夹具损耗等情况,样品主要技术指标与设计值较为一致。     

A New Design Methodology for Time-Based Capacitance-to-Digital Converters (T-CDCs)

This paper introduces a 9-bit time-based capacitance-to-digital converter (T-CDC). This T-CDC adopts a new design methodology for parasitic cancellation with a simple calibration technique. In T-CDCs, the input sensor capacitance is first converted into a delay pulse using a capacitance-to-time converter (CTC) circuit; then this delay signal is converted into a digital code through a time-to-digital converter (TDC) circuit. A prototype of the proposed T-CDC is implemented in UMC 0.13 μm CMOS technology. This T-CDC consumes 8.42 μW and achieves a maximum SNR of 45.14 dB with a conversion time of 1 μs that corresponds to a figure of merit (FoM) of 16.4 fJ/Conv.     

Design of switchable band‐notched frequency selective absorber

An active band‐notched frequency selective absorber (BNFSA) with switchable notch band is proposed in this article. The BNFSA is a two‐layer structure composed of a lossy layer at the top and a ground plane at the bottom, separated by an air spacer. The element of the lossy layer is a lumped‐resistor‐loaded metallic dipole with a parallel LC resonance structure, which is realized by complementary n‐shaped resonator (CnR) inserted in the center, and PIN diode is welded at two arms of CnR. The bias circuit printed on the back of the substrate of the lossy layer connects to anode and cathode of the diode by via hole and isolates by the inductor. Simulation results show that the notch bands are located at 4.50 and 6.81 GHz when the diode sets to ON and OFF, respectively. To validate the performance of switchable BNFSA, the prototypes are fabricated and measured, reasonable agreement between simulated and measured results is obtained.     

一种基于MEMS工艺的365 GHz硅微波导垂直转接结构

基于微电子机械系统(MEMS)工艺设计并制作了一种THz垂直转接结构,该结构采用6层硅片堆叠的硅微波导形式。理论分析计算了垂直转接结构的参数,并使用三维电磁场分析软件HFSS对该结构进行了模拟仿真。设计得到了中心频率为365 GHz、带宽为80 GHz、芯片尺寸为10 mm×7 mm×2.7 mm的THz垂直转接结构。给出了一套基于MEMS工艺的硅微波导的制作流程,制作了365 GHz垂直转接结构并对其进行测试。获得的THz垂直转接结构的回波损耗随频率变化的测试结果与仿真结果基本一致。采用MEMS工艺制作的硅微波导垂直转接结构具有精度高、一致性好、成本低的特点,满足THz器件的发展需求。     

A novel proposal for all optical 3 to 8 decoder based on nonlinear ring resonators

In this paper, a 3 to 8 optical decoder was proposed using nonlinear photonic crystal ring resonators. For realizing the 3 to 8 decoder, we combined seven 1 to 2 optical decoders. In the proposed structure, X, Y and Z serve as input ports. By combination of these ports, one can control which output port to be ON. The maximum time delay of the proposed structure is about 6?ps.     

Poly(4-styrenesulfonic acid) doped polypyrrole/tungsten oxide/reduced graphene oxide nanocomposite films based surface acoustic wave sensors for NO sensing behavior

Poly(4-styrenesulfonic acid) (PSSA) doped polypyrrole (PPy)/tungsten oxide (WO₃)/reduced graphene oxide (rGO) hybrid nanocomposite have been successfully synthesized using appropriate amounts of PSSA, pyrrole monomer, WO₃, and rGO dispersed in aqueous solution through in situ chemical oxidation polymerization. Here, a simple spin coating method was used to fabricate a nitric oxide (NO) gas sensor composed of the aforementioned nanocomposite on a surface acoustic wave (SAW) resonator. This sensor can detect NO gas at concentrations of 1–110 parts per billion (ppb) at room temperature in dry air, with a sensitivity of 12 Hz/ppb and response and recovery times of <2 min. Moreover, its limit of detection (LOD) is 0.31 ppb for a signal to noise ratio of 3. It demonstrates repeatability, fast response, and recovery at room temperature. Moreover, its sensory performance remains highly stable over 30 days with only a 6.3% decrease in sensitivity. In addition, the sensor is highly selective for NO, even when nitrogen dioxide, ammonia, and carbon dioxide are applied as interfering gases. The inclusion of rGO (with large specific surface area) and the synergic effect of n-type WO₃ nanoparticles in the p-type PPy matrix (leading to p-n heterojunction region formation) possibly underlie the efficient sensing performance of our sensor.     

Calibration of low-pressure MEMS gas sensor for detection of hydrogen gas

Detection of hydrogen by sensors are significant for improvement and safe usage of hydrogen gas as an energy source. In this paper, the application of the MEMS gas sensor for detection of hydrogen gas is numerically studied to develop the application of this device in different industrial applications. The flow feature and force generation mechanism inside a rectangular enclosure with heat and cold arms as the non-isothermal walls are inclusively discussed. In this study, the pressure of hydrogen is varied from 62 to 1500 pa correspond to Knudsen number from 0.1 to 4.5 to investigate all characteristics of the thermal-driven force inside the MEMS sensor. In order to simulate a rarefied gas inside the micro gas detector, Boltzmann equations are applied to obtain high precision results. To solve these equations, Direct Simulation Monte Carlo (DSMC) approach is used as a robust method for the non-equilibrium flow field. The effects of length, thickness and temperature of arms are comprehensively investigated in different ambient pressures. In addition, the effect of various hydrogen concentrations on the Knudsen force is studied. Our findings show that maximum Knudsen force occurs at P = 387 pressure and intensifies when the length of the arms is increased from 50 μm to 150 μm. In addition, the obtained results demonstrate that the generated force is highly sensitive to hydrogen gas species and this enables device for detection of hydrogen gas.     

基于MEMS 加速度计的倾斜姿态角传感器设计

针对应用领域中判断水平面及水平面夹角的问题,设计一种倾斜姿态角传感器。把MEMS加速度计SCA103T-D04与C8051F47单片机组合在一起,对MEMS加速度计输出信号进行调理和AD采集,单片机C8051F047完成数据分析和温度补偿,并通过CAN总线通讯接口和RS232通讯接口输出倾斜角度值,输出周期为200 ms。该倾斜姿态角传感器测量精度为0.03°,测量范围为–6°~6°,具有体积小、重量轻、精度高、温度适应范围宽的特性,可广泛应用于建筑、道路、桥梁及军用设备等领域。